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Vacuum Levels & Pressure Ranges

“Vacuum” covers more than 15 orders of magnitude of pressure. Engineers divide it into ranges because each one needs different pumps, gauges, materials and design rules.

Logarithmic pressure scale from atmosphere to 10⁻¹³ mbar showing rough, medium, high, ultra-high and extreme-high vacuum ranges with examples such as HVAC evacuation, freeze drying, low Earth orbit and the Moon.
Vacuum levels pressure scale. Vacuum ranges on a logarithmic scale, with everyday and natural examples. Each step on the axis is a factor of ten.
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Vacuum ranges at a glance

RangePambarTorrMean free path (air)
Low / rough vacuum 101,300 – 100 1,013 – 1 760 – 0.75 65 nm – 66 µm
Medium / fine vacuum 100 – 0.1 1 – 0.001 0.75 – 7.5×10⁻⁴ 66 µm – 66 mm
High vacuum (HV) 0.1 – 1×10⁻⁶ 0.001 – 1×10⁻⁸ 7.5×10⁻⁴ – 7.5×10⁻⁹ 66 mm – 6.6 km
Ultra-high vacuum (UHV) 1×10⁻⁶ – 1×10⁻¹⁰ 1×10⁻⁸ – 1×10⁻¹² 7.5×10⁻⁹ – 7.5×10⁻¹³ 6.6 km – 66,000 km
Extreme-high vacuum (XHV) 1×10⁻¹⁰ – < 10⁻¹⁰ 1×10⁻¹² – < 10⁻¹² 7.5×10⁻¹³ – < 10⁻¹² 66,000 km – > 66 km

Range boundaries follow ISO 3529-1:2019, the international vacuum vocabulary standard; extreme-high vacuum is a widely used extension below it.

Pumps, gauges and applications by range

Low / rough vacuum

1,013 → 1 mbar

Pumps: Rotary vane, diaphragm, liquid ring, claw, screw, ejectors

Gauges: Bourdon, piezo, capacitance diaphragm

Applications: Vacuum lifting & handling, packaging, vacuum forming, filtration, degassing, distillation, milking, medical suction

Medium / fine vacuum

1 → 0.001 mbar

Pumps: Two-stage rotary vane, scroll, dry screw, Roots booster

Gauges: Pirani, thermocouple, capacitance diaphragm

Applications: HVAC/R evacuation, freeze drying, vacuum drying, heat treatment, metallurgy, backing of HV pumps

High vacuum (HV)

0.001 → 1×10⁻⁸ mbar

Pumps: Turbomolecular, diffusion, cryopump (with backing pump)

Gauges: Cold cathode (Penning), hot cathode ionization

Applications: Thin-film coating (PVD), electron microscopes, mass spectrometry, vacuum furnaces, CRT & lamp manufacturing

Ultra-high vacuum (UHV)

1×10⁻⁸ → 1×10⁻¹² mbar

Pumps: Turbomolecular, ion getter, titanium sublimation, NEG, cryopump — with bake-out

Gauges: Bayard-Alpert ionization, inverted magnetron, residual gas analyser

Applications: Surface science, particle accelerators, molecular beam epitaxy, semiconductor research

Extreme-high vacuum (XHV)

1×10⁻¹² → < 10⁻¹² mbar

Pumps: Cryogenic systems, NEG + ion pumps, special materials and bake-out

Gauges: Extractor gauges, specialised ionization gauges

Applications: Gravitational-wave detectors, storage rings, fundamental physics experiments

Chart of typical operating pressure ranges for vacuum pumps: liquid ring, diaphragm, rotary vane, scroll, dry screw, Roots, diffusion, turbomolecular, cryopump, ion pump and getter pumps, from atmosphere to ultra-high vacuum.
Vacuum pump operating pressure ranges. Typical operating ranges of vacuum pump types. Pumps below the dashed line need a backing or roughing pump.
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Chart of vacuum gauge measuring ranges: Bourdon, capacitance diaphragm, Pirani, thermocouple, cold cathode, Bayard-Alpert hot cathode and extractor gauges, from atmosphere to 10⁻¹² mbar.
Vacuum gauge measuring ranges. Measuring ranges of common vacuum gauges. Covering the full range usually takes two or more gauge types.
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What is the pressure inside a vacuum?

A vacuum is not “zero pressure” — it is simply a pressure lower than the surrounding atmosphere. How low depends entirely on the application. The table below puts familiar examples on the same absolute scale.

ExamplePa (abs)TorrinHg vacuum
Sea level atmosphere 101,000 760 0.00
Household vacuum cleaner 80,000 600 6.30
Top of Mount Everest (8,849 m) 33,700 253 19.97
HVAC evacuation target (500 microns) 66.7 0.5 29.90
Freeze dryer 10 0.075 29.92
Incandescent light bulb 1 0.0075 29.92
Low Earth orbit (≈400 km, ISS) 1×10⁻⁵ 7.5×10⁻⁸ 29.92
Surface of the Moon (night) 3×10⁻¹⁰ 2.25×10⁻¹² 29.92
Interplanetary space 1×10⁻¹¹ 7.5×10⁻¹⁴ 29.92

Full vacuum, perfect vacuum and absolute zero pressure

A perfect vacuum — a space with no molecules at all — is a theoretical limit. In gauge units at sea level it corresponds to 29.92 inHg vacuum, −14.696 psig, −101.325 kPa or 100 % vacuum. In absolute units it is simply 0 Pa, 0 Torr or 0 psia. Specifications that say “full vacuum rated” (for tanks and vessels) mean the vessel can withstand the full external atmospheric pressure of ~1 bar without collapsing.

Diagram comparing absolute pressure measured up from a perfect vacuum with vacuum gauge readings measured down from atmospheric pressure, with an example of 25 inHg vacuum equal to 16.7 kPa absolute.
Absolute vs. gauge pressure in vacuum. Absolute pressure counts up from a perfect vacuum; vacuum (gauge) readings count down from atmospheric pressure. 25 inHg vacuum = 16.7 kPa absolute at sea level.
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Need to convert between these units? Use the vacuum unit converter.

References & further reading

  1. ISO/TC 112. ISO 3529-1:2019 Vacuum technology — Vocabulary — Part 1: General terms. International Organization for Standardization (2019). Official definitions of the vacuum ranges.
  2. PTB Working Group 7.54. Vacuum Metrology. Physikalisch-Technische Bundesanstalt (German national metrology institute). Primary vacuum standards from 10⁻⁹ Pa to 1 kPa and gauge calibration.
  3. K. Jousten (ed.). Handbook of Vacuum Technology, 2nd ed.. Wiley-VCH (2016). Standard reference on gas flow, conductance, pumps and gauges.
  4. CERN Accelerator School. CAS Vacuum for Particle Accelerators, Glumslöv, Sweden, 2017 — proceedings. CERN, free to read. Up-to-date lectures on materials, pumps, gauges and leak detection.

Frequently asked questions

What are the levels of vacuum?

Vacuum is divided by absolute pressure into low (rough) vacuum from atmosphere to 100 Pa (1 mbar), medium (fine) vacuum from 100 Pa to 0.1 Pa, high vacuum from 0.1 Pa to 10⁻⁶ Pa, ultra-high vacuum from 10⁻⁶ Pa to 10⁻¹⁰ Pa, and extreme-high vacuum below 10⁻¹⁰ Pa. These follow ISO 3529-1, with XHV as a commonly used extension.

What is the pressure inside a vacuum?

A vacuum is any space with a pressure below atmospheric pressure — it is not zero. A household vacuum cleaner reaches about 80 kPa (20 % vacuum), an HVAC evacuation reaches 500 microns (67 Pa), and an ultra-high vacuum chamber reaches 10⁻⁸ Pa. A perfect vacuum (0 Pa absolute) cannot be achieved in practice.

What is a full vacuum in inches of mercury?

At sea level a perfect vacuum reads 29.92 inHg vacuum, equal to 0 psia, −14.696 psig or −101.325 kPa gauge. At altitude the maximum gauge reading is lower because atmospheric pressure is lower.

What is considered a high vacuum?

High vacuum is the range from 0.1 Pa (10⁻³ mbar, 7.5 × 10⁻⁴ Torr) down to 10⁻⁶ Pa (10⁻⁸ mbar). In this range the mean free path of gas molecules is longer than typical chamber dimensions, so gas flow is molecular and turbomolecular, diffusion or cryopumps are needed.

What is the ultimate vacuum pressure of a pump?

The ultimate (or base) pressure is the lowest pressure a pump can reach when blanked off, with no gas load. Real systems settle above it because of leaks, outgassing and line conductance. Typical values: diaphragm ~1 mbar, two-stage rotary vane ~10⁻³ mbar, turbomolecular 10⁻⁹–10⁻¹⁰ mbar.

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