The main global suppliers of industrial, semiconductor and laboratory vacuum pumps — who makes what, who owns whom, and where to find them. Filter by pump technology or market to narrow the list.
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Global compressor and vacuum group. Its own-brand industrial pumps (e.g. variable-speed screw pumps) sit alongside Edwards and Leybold, making it one of the largest vacuum suppliers worldwide.
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Major supplier of dry pumps and abatement for semiconductor fabs, plus rotary vane, scroll and turbomolecular pumps for science and industry.
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One of the oldest names in vacuum technology, covering rough to ultra-high vacuum with pumps, gauges, leak detectors and complete systems.
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Family-owned specialist with one of the broadest industrial vacuum ranges, best known for its oil-lubricated rotary vane pumps used in packaging and processing.
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Inventor of the turbomolecular pump and a leading supplier of high-vacuum pumps, gauges, leak detectors and mass spectrometers.
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Independent manufacturer of rotary vane, claw and side-channel vacuum pumps and compressors for printing, woodworking, packaging and CNC hold-down.
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Industrial vacuum and low-pressure brand known for dry-running rotary vane and claw pumps and side-channel blowers.
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Leading name in liquid ring vacuum pumps and compressors for paper, power, mining and chemical processing.
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Liquid ring vacuum pumps and lobe (Roots) blowers for process, wastewater and conveying applications.
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Laboratory vacuum pumps and systems for filtration, evaporation, drying and instrument backing.
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Compact vacuum pumps and compressors widely built into OEM equipment, medical devices and instruments.
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Japanese vacuum group supplying pumps, gauges and complete thin-film deposition equipment for semiconductors and flat-panel displays.
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Major supplier of multi-stage dry vacuum pumps and turbomolecular pumps to the semiconductor industry.
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Specialist in dry vacuum pumps for semiconductor, LCD and solar manufacturing processes.
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Manufacturer of turbomolecular pumps and high-vacuum components for research and semiconductor tools.
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Korean manufacturer of dry vacuum pumps for semiconductor and display fabs.
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Former Varian vacuum business: ion pumps, turbomolecular and dry scroll pumps, gauges and helium leak detectors for research and analytical instruments.
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Pioneer of oil-free scroll vacuum pumps and compressors.
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Diaphragm pump specialist for laboratory, analytical and OEM applications, including chemically resistant models.
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Laboratory vacuum specialist: chemistry diaphragm pumps, vacuum controllers and pumping units for rotary evaporation.
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Maker of Kinney rotary piston and liquid ring pumps plus Roots-type boosters for heavy industrial and furnace applications.
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Liquid ring and rotary vane vacuum pumps and packaged systems for industrial, medical and process applications.
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Long-established liquid ring vacuum pump brand for chemical, pharmaceutical and power applications.
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Steam jet ejector and condenser systems for refinery vacuum distillation, chemical and power plants.
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High-capacity rotary vane vacuum pumps and compressors for continuous industrial duty.
Visit websiteNo brands match both filters — try a different combination.
The vacuum industry has consolidated heavily. Several well-known brands now belong to the same parent group while keeping their own product lines and sales networks.
| Parent group | Vacuum brands |
|---|---|
| Atlas Copco | Atlas Copco (own brand), Edwards, Leybold |
| Busch Group | Busch Vacuum Solutions, Pfeiffer Vacuum |
| Ingersoll Rand | Elmo Rietschle, Nash, Robuschi, Welch |
| IDEX | Gast |
| Flowserve | SIHI |
| Brand | Rotary vane | Screw | Claw | Liquid ring | Scroll | Roots | Turbomolecular | Cryopump | Diaphragm | Side channel | Ion pump | Rotary piston | Ejector |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Atlas Copco | ● | ● | ● | ● | |||||||||
| Edwards | ● | ● | ● | ● | ● | ● | |||||||
| Leybold | ● | ● | ● | ● | ● | ● | |||||||
| Busch Vacuum Solutions | ● | ● | ● | ● | ● | ||||||||
| Pfeiffer Vacuum | ● | ● | ● | ● | ● | ● | |||||||
| Becker | ● | ● | ● | ● | |||||||||
| Elmo Rietschle | ● | ● | ● | ● | ● | ||||||||
| Nash | ● | ||||||||||||
| Robuschi | ● | ● | |||||||||||
| Welch | ● | ● | |||||||||||
| Gast | ● | ● | ● | ||||||||||
| ULVAC | ● | ● | ● | ● | ● | ||||||||
| Ebara | ● | ● | ● | ||||||||||
| Kashiyama | ● | ● | |||||||||||
| Osaka Vacuum | ● | ||||||||||||
| LOT Vacuum | ● | ● | |||||||||||
| Agilent (Vacuum Technologies) | ● | ● | ● | ● | |||||||||
| Anest Iwata | ● | ||||||||||||
| KNF | ● | ||||||||||||
| Vacuubrand | ● | ● | |||||||||||
| Tuthill (Kinney) | ● | ● | ● | ||||||||||
| Dekker Vacuum Technologies | ● | ● | |||||||||||
| Flowserve SIHI | ● | ||||||||||||
| Graham | ● | ● | |||||||||||
| Pneumofore | ● |
Product ranges and ownership as of 2025; manufacturers regularly add, drop and acquire product lines. Not sure which technology you need? Start with vacuum pump types compared. This site is independent and not affiliated with any manufacturer.
The global vacuum pump market is led by a few groups: Atlas Copco (which owns Edwards and Leybold), the Busch Group (Busch Vacuum Solutions and Pfeiffer Vacuum) and Ingersoll Rand (Elmo Rietschle, Nash, Welch, Robuschi). Japanese suppliers such as ULVAC, Ebara and Kashiyama are major players in semiconductor dry pumps.
There is no single best brand — each specialises. For industrial rotary vane and claw pumps, Busch, Becker, Atlas Copco and Elmo Rietschle are common choices; for semiconductor dry pumps, Edwards, Ebara, Kashiyama and ULVAC; for turbomolecular and high-vacuum pumps, Pfeiffer, Leybold, Edwards and Agilent; for lab diaphragm pumps, KNF, Vacuubrand and Welch. Choose on pump technology, local service support and total cost of ownership.
They are separate brands with their own product lines, but both are owned by Atlas Copco — Edwards since 2014 and Leybold since 2016.
Pfeiffer Vacuum is majority-owned by the Busch Group, the family-owned parent of Busch Vacuum Solutions, following Busch’s takeover offer in 2023. Both brands continue to operate under their own names.
Evacuation time for a chamber — or the pump size you need for a target time.
Pipe conductance, effective pumping speed, gas velocity and minimum line diameter.
Rough, medium, high and ultra-high vacuum explained with pressure ranges and applications.
Rotary vane, scroll, screw, Roots, liquid ring, turbo, diffusion, cryo and ion pumps compared.